LocationCambridge, Electrical Engineering Division LeaderMatt Pryn TimingMichaelmas Term |
PrerequisitesBasic engineering principles Structure7hrs laboratory + 2hrs private study AssessmentMaterial / Format / Timing / Marks/Credits Coursework / Report / 3 December / 100% / 5 |
Objectives/Learning Outcomes/Competences
- Introduction to e-beam patterning
- Introduction to lithography and mask fabrication
- Understand metal sputter deposition
- Learn the basics of cleanroom research and how to access the cleanroom equipment
- Implement good lab practice
Syllabus/Range
- Lithography
- eBeam patterning
- Metal sputtering
- Basic microscope verification