e-Beam lithography Laboratory

This aims to demonstrate precise fabrication using lithography, how this is relevant to industrial manufacturing processes, and the problems introduced when scaling precision manufacture up to high throughput. Also, to demonstrate the principles involved in scientific research and how experiments must be designed for fabrication feasibility.
This lab will investigate the fabrication of a test wafer, from design to verification. Students will work in a cleanroom and be a part of all manufacture stages including CAD, sample cleaning, spin coating, e-beam operation, developing, metal sputter, and microscope verification.

Location Cambridge, Electrical Engineering Division Leader Matt Pryn Timing Michaelmas Term	Prerequisites Basic engineering principles Structure 7hrs laboratory + 2hrs private study Assessment Material / Format / Timing / Marks/Credits Coursework / Report / 3 December / 100% / 5

Introduction to e-beam patterning
Introduction to lithography and mask fabrication
Understand metal sputter deposition
Learn the basics of cleanroom research and how to access the cleanroom equipment
Implement good lab practice