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figure-22-stationary-etch-dwell-power.jpg

Figure 22 Stationary Etch Dwell Power Investigation at 5L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s
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Figure 22 Stationary Etch Dwell Power Investigation at 5L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s
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Figure 22 Stationary Etch Dwell Power Investigation

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