- pic 3
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- pic 2
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- pic 1
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- Figure 35 Microwave Power Effect On Plasma Jet Discharge Photonic Intensity
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Figure 35 Microwave Power Effect On Plasma Jet Discharge Photonic Intensity
- Figure 34 Carbon Tetrafluoride Cross Sections
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Figure 34 Carbon Tetrafluoride Cross Sections
- Figure 33 Argon Cross Sections
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Figure 33 Argon Cross Sections
- Figure 32 Stationary Temporal Investigation at 150W
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Figure 32 Stationary Temporal Investigation at 150W, 5L/min Ar + 0.6L/min CF4
- Figure 31 Stationary Temporal Investigation at 150W
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Figure 31 Stationary Temporal Investigation at 150W, 5L/min Ar + 0.5L/min CF4
- Figure 30
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Figure 30 Plasma Map CF4 Gas Flow Investigation at 150W, 5L/min Ar + 0.6L/min CF4
- Figure 29
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Figure 29 Plasma Map CF4 Gas Flow Investigation at 150W, 5L/min Ar + 0.5L/min CF4
- Figure 4 Microwave polar plot coaxial electrode position
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Figure 4 Microwave polar plot coaxial electrode position (a) coaxial electrode starting position; (b) coaxial electrode finishing position
- Figure 28
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Figure 28 Plasma Map CF4 Gas Flow Investigation at 150W, 5L/min Ar + 0.4L/min CF4
- Figure 27 Spectroscopy Experimental Setup
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Figure 27 Spectroscopy Experimental Setup
- Figure 26 Stationary Dwell Argon Gas Flow
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Figure 26 Stationary Dwell Argon Gas Flow Investigation at 150W, 3L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s - 3D View
- Figure 25 Stationary Dwell Argon Gas Flow
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Figure 25 Stationary Dwell Argon Gas Flow Investigation at 150W, 3L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s
- Figure 23 Single Trench 150W
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Figure 23 Single Trench 150W 5L/min Ar + 0.5L/min CF4 stand-off distance 10mm Speed 10mm/min
- Figure 24 Single Trench 150W
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Figure 24 Single Trench 150W 5L/min Ar + 0.5L/min CF4 stand-off distance 10mm Speed 10mm/min Top View
- Figure 22 Stationary Etch Dwell Power Investigation
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Figure 22 Stationary Etch Dwell Power Investigation at 5L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s
- Figure 21 Stationary Dwell Power Investigation at 100W
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Figure 21 Stationary Dwell Power Investigation at 100W, 5L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s - Cross Section
- Figure 20 Stationary Dwell Power Investigation at 200W
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Figure 20 Stationary Dwell Power Investigation at 200W, 5L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s
- Figure 19 Stationary Dwell Power Investigation at 100W
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Figure 19 Stationary Dwell Power Investigation at 100W, 5L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s
- Figure 17 Microwave Induced Plasma System
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Figure 17 Microwave Induced Plasma System
- Figure 15
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Figure 15 Plasma jet analysis locus
- Figure 16 Comparison of different secondary gases
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Figure 16 Comparison of different secondary gases injected downstream of the argon plasma jet
- Figure 14 Plasma jet cross section
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Figure 14 Plasma jet cross section 1mm downstream from nozzle
- Figure 12
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Figure 12 Comparison of argon plasma jet without and with carbon tetrafluoride gas injected downstreamLeft ) main gas = 1L/min Ar; Right ) main gas = 1L/min Ar + nozzle gas = 0.01L/min CF4
- Figure 11
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Figure 11 Comparison of argon plasma jet without and with sulphur hexafluoride gas injected downstreamLeft ) main gas = 1L/min Ar; Right ) main gas = 1L/min Ar + nozzle gas = 0.01L/min SF6
- Figure 10
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Figure 10 Comparison of argon plasma jet without and with argon gas injected downstream (a) main gas = 1L/min Ar; (b) main gas = 1L/min Ar + nozzle gas = 0.01L/min Ar
- Figure 9 Adtec Coaxial Electrode Microwave
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Figure 9 Adtec Coaxial Electrode Microwave Induced Plasma torch cross section
- Figure 8 Optical Emission Spectroscopy experimental setup
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Figure 8 Optical Emission Spectroscopy experimental setup
- Figure 7 Pitch & Yaw
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Figure 7 Pitch & Yaw
- Figure 6 Vertical & Horizontal Polarisation of Antenna Electric Fields
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Figure 6 Vertical & Horizontal Polarisation of Antenna Electric Fields
- Figure 3 Microwave polar plot
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Figure 3 Microwave polar plot experimental setup
- Figure 2 Adtec Coaxial Electrode
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Figure 2 Adtec Coaxial Electrode Microwave Induced Plasma torch
- Figure 1 Coaxial electrod
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Figure 1 Coaxial electrode enclosed within a fused quartz tube
- Figure 5 Roll, Pitch, Yaw
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Figure 5 Roll, Pitch, Yaw
- Applications
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- Figure 13
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Figure 13 Plasma jet cross section path taken
- Figure 18 Plasma Jets
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Figure 18 Plasma Jets (a) 25W 5L/min Ar; (b) 100W 5L/min Ar; (c) 200W 5L/min Ar; (d) 200W 5L/min Ar + 0.5L/min CF4
