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Adam Bennett project

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Figure 35 Microwave Power Effect On Plasma Jet Discharge Photonic Intensity

Figure 35 Microwave Power Effect On Plasma Jet Discharge Photonic Intensity

Figure 34 Carbon Tetrafluoride Cross Sections

Figure 34 Carbon Tetrafluoride Cross Sections

Figure 33 Argon Cross Sections

Figure 33 Argon Cross Sections

Figure 32 Stationary Temporal Investigation at 150W

Figure 32 Stationary Temporal Investigation at 150W, 5L/min Ar + 0.6L/min CF4

Figure 31 Stationary Temporal Investigation at 150W

Figure 31 Stationary Temporal Investigation at 150W, 5L/min Ar + 0.5L/min CF4

Figure 30

Figure 30 Plasma Map CF4 Gas Flow Investigation at 150W, 5L/min Ar + 0.6L/min CF4

Figure 29

Figure 29 Plasma Map CF4 Gas Flow Investigation at 150W, 5L/min Ar + 0.5L/min CF4

Figure 4 Microwave polar plot coaxial electrode position

Figure 4 Microwave polar plot coaxial electrode position (a) coaxial electrode starting position; (b) coaxial electrode finishing position

Figure 28

Figure 28 Plasma Map CF4 Gas Flow Investigation at 150W, 5L/min Ar + 0.4L/min CF4

Figure 27 Spectroscopy Experimental Setup

Figure 27 Spectroscopy Experimental Setup

Figure 26 Stationary Dwell Argon Gas Flow

Figure 26 Stationary Dwell Argon Gas Flow Investigation at 150W, 3L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s - 3D View

Figure 25 Stationary Dwell Argon Gas Flow

Figure 25 Stationary Dwell Argon Gas Flow Investigation at 150W, 3L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s

Figure 23 Single Trench 150W

Figure 23 Single Trench 150W 5L/min Ar + 0.5L/min CF4 stand-off distance 10mm Speed 10mm/min

Figure 24 Single Trench 150W

Figure 24 Single Trench 150W 5L/min Ar + 0.5L/min CF4 stand-off distance 10mm Speed 10mm/min Top View

Figure 22 Stationary Etch Dwell Power Investigation

Figure 22 Stationary Etch Dwell Power Investigation at 5L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s

Figure 21 Stationary Dwell Power Investigation at 100W

Figure 21 Stationary Dwell Power Investigation at 100W, 5L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s - Cross Section

Figure 20 Stationary Dwell Power Investigation at 200W

Figure 20 Stationary Dwell Power Investigation at 200W, 5L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s

Figure 19 Stationary Dwell Power Investigation at 100W

Figure 19 Stationary Dwell Power Investigation at 100W, 5L/min Ar + 0.5L/min CF4, stand-off distance 10mm, dwell time 10s

Figure 17 Microwave Induced Plasma System

Figure 17 Microwave Induced Plasma System

Figure 15

Figure 15 Plasma jet analysis locus

Figure 16 Comparison of different secondary gases

Figure 16 Comparison of different secondary gases injected downstream of the argon plasma jet

Figure 14 Plasma jet cross section

Figure 14 Plasma jet cross section 1mm downstream from nozzle

Figure 12

Figure 12 Comparison of argon plasma jet without and with carbon tetrafluoride gas injected downstream Left ) main gas = 1L/min Ar; Right ) main gas = 1L/min Ar + nozzle gas = 0.01L/min CF4

Figure 11

Figure 11 Comparison of argon plasma jet without and with sulphur hexafluoride gas injected downstream Left ) main gas = 1L/min Ar; Right ) main gas = 1L/min Ar + nozzle gas = 0.01L/min SF6

Figure 10

Figure 10 Comparison of argon plasma jet without and with argon gas injected downstream (a) main gas = 1L/min Ar; (b) main gas = 1L/min Ar + nozzle gas = 0.01L/min Ar

Figure 9 Adtec Coaxial Electrode Microwave

Figure 9 Adtec Coaxial Electrode Microwave Induced Plasma torch cross section

Figure 8 Optical Emission Spectroscopy experimental setup

Figure 8 Optical Emission Spectroscopy experimental setup

Figure 7 Pitch & Yaw

Figure 7 Pitch & Yaw

Figure 6 Vertical & Horizontal Polarisation of Antenna Electric Fields

Figure 6 Vertical & Horizontal Polarisation of Antenna Electric Fields

Figure 3 Microwave polar plot

Figure 3 Microwave polar plot experimental setup

Figure 2 Adtec Coaxial Electrode

Figure 2 Adtec Coaxial Electrode Microwave Induced Plasma torch

Figure 1 Coaxial electrod

Figure 1 Coaxial electrode enclosed within a fused quartz tube

Figure 5 Roll, Pitch, Yaw

Figure 5 Roll, Pitch, Yaw

Applications

 
Figure 13

Figure 13 Plasma jet cross section path taken

Figure 18 Plasma Jets

Figure 18 Plasma Jets (a) 25W 5L/min Ar; (b) 100W 5L/min Ar; (c) 200W 5L/min Ar; (d) 200W 5L/min Ar + 0.5L/min CF4