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Centre for Doctoral Training in Ultra Precision Engineering

 

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Figure 23 Single Trench 150W 5L/min Ar + 0.5L/min CF4 stand-off distance 10mm Speed 10mm/min
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Figure 23 Single Trench 150W 5L/min Ar + 0.5L/min CF4 stand-off distance 10mm Speed 10mm/min
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Figure 23 Single Trench 150W

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